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ThinkMind // CENICS 2017, The Tenth International Conference on Advances in Circuits, Electronics and Micro-electronics // View article cenics_2017_1_20_60041


Table Reference-Based Acceleration of a Lithography Hotspot Detection Method Based on Approximate String Search

Authors:
Shuma Tamagawa
Masato Inagi
Shinobu Nagayama
Shin'ichi Wakabayashi

Keywords: lithography; hotspot; optical simulation; approximate string matching

Abstract:
In nanoscale large-scale integration (LSI) manufacturing, there exist hotspots on mask patterns, which cause failures of pattern transfer. Such hotspots are detected by optical simulation to remove them. However, it requires a long time. Thus, development of efficient hotspot detection methods is required. As one of the methods, an existing one based on approximate string search has been proposed. Although this method is expected to find hotspots more flexibly than commonly used template matching, computation of edit distance matrices used for approximate string search still requires a long time. Thus, in this study, we accelerate the computation by using table reference of precomputed values and simultaneous computation of multiple elements. Our experiments showed that our improved method achieved about 1/11 computation time compared to the original one.

Pages: 8 to 14

Copyright: Copyright (c) IARIA, 2017

Publication date: September 10, 2017

Published in: conference

ISSN: 2308-426X

ISBN: 978-1-61208-585-2

Location: Rome, Italy

Dates: from September 10, 2017 to September 14, 2017

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