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ThinkMind // ALLSENSORS 2020, The Fifth International Conference on Advances in Sensors, Actuators, Metering and Sensing // View article allsensors_2020_2_160_70090
Design of an acoustic transducer structure for biosensing
 Authors: Emmanuel Attal Sophie Sok Thérèse Leblois Keywords: Gallium Arsenide; Acoustic transducer; Holes numbers. Abstract: In a biomedical context linked to the detection of biological particles in a liquid by a biosensor, we have modeled a piezoelectric transducer based on Gallium Arsenide. The future application will enable to evaluate the mass of biological specific elements present in a complex fluid. The multiphysics simulations of this transducer allowed us to identify a quasi-transverse thickness mode at around 2 MHz. For this mode, the out-of-plane displacement is low, which is a prerequisite to keep the performance when immersed in a liquid medium. In this study, we demonstrated the effect of holes distributed over the structure on the in-plane/out-of-plane displacement ratio and on its resonance frequency. Pages: 76 to 77 Copyright: Copyright (c) IARIA, 2020 Publication date: March 22, 2020 Published in: conference ISSN: 2519-836X ISBN: 978-1-61208-766-5 Location: Valencia, Spain Dates: from November 21, 2020 to November 21, 2020
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