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ThinkMind // International Journal On Advances in Systems and Measurements, volume 10, numbers 3 and 4, 2017 // View article sysmea_v10_n34_2017_6


Development of MOX sensors for low VOCs concentrations detection: responses comparison for WO3, SnO2, and ZnO sensitive layers with interfering gases as CO and CO2

Authors:
Frank James
Tomas Fiorido
Marc Bendahan
Khalifa Aguir

Keywords: gas sensor; MOX sensor; isobutylene; benzene carbon dioxyde; carbone monoxyde

Abstract:
N-type Metal Oxide sensors was developed to detect Volatile Organic Compounds at low concentration level. Sensitive layers like SnO2, ZnO and WO3 were deposited by reactive RF sputtering method. The sensors is based on a heater and a MOX sensitive layer on a silicon substrate. Gas sensing properties have been investigated toward isobutylene, as a typical VOC and benzene. The optimum working temperature was experimentally determined at 285°C for this study. This work highlights the detection of VOCs with interfering gases by MOX sensor at low level. Gas like CO and CO2 can be interfering gas for VOCs detection. This study was focused on the detection of isobutylene and benzene from 50 ppb to 500 ppb. The low selectivity is in fact a well-known problem of these sensors but we made a comparison between these MOX sensors at the same temperature in order to have a simple sensor array on the same chip in the future. This system will be used for a real time indoor air monitoring.

Pages: 158 to 162

Copyright: Copyright (c) to authors, 2017. Used with permission.

Publication date: December 31, 2017

Published in: journal

ISSN: 1942-261x

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